GB/T 41153-2021
China national
standard english version:
GB
中华人民共和国国家标准
NATIONAL
STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA
GB/T 41153-2021
Determination of boron, aluminum and nitrogen impurity content in silicon carbide single crystal -- Secondary ion mass spectrometry 碳化硅单晶中硼、铝、氮杂质含量的测定? 二次离子质谱法
Issued Date:2021/12/31
Implemented Date:2022/7/1
Issued by:
The Standardization Administration of the People's Republic of China